The 193nm DUV laser, with short - wavelength and high - energy photons, is used in semiconductor lithography for ultra - fine patterning. It also enables precise materials ablation and high - sensitivity spectroscopic detection, advancing semiconductor, materials, and analytical chemistry fields.
Wavelength (nm) | 193 |
Pulse Duration (ns) | 8 to 12 |
Average Power (mW) | 10 |
Monopulse EnergyMonopulse Energy (uJ) | 1.6 |
Repetition Rate (kHz) | 5 kHz to 10 |
M2 | <1.6 |
Output Power Stability over 8 hours (%) | <3 |
Cooled Method | Water-cooled(20 to 25℃) |
Output Method | Space output |
Spot Size | ~1.5 (customizable) |
Lithography |
Semiconductor manufacturing |
Nanostructure manufacturing |
Semiconductor chip packaging |
Biochip processing |
Optical fiber processing |
Material processing |
Packaging lithography |
MEMS manufacturing |
Optical component processing |