info@kpglaser.com
United States (English / $USD)
LPNS-193

The 193nm DUV laser, with short - wavelength and high - energy photons, is used in semiconductor lithography for ultra - fine patterning. It also enables precise materials ablation and high - sensitivity spectroscopic detection, advancing semiconductor, materials, and analytical chemistry fields.

Parameter
Wavelength (nm)

193

Pulse Duration (ns)

8 to 12

Average Power (mW)

10

Monopulse EnergyMonopulse Energy (uJ)

1.6

Repetition Rate (kHz)

5 kHz to 10

M2

<1.6

Output Power Stability over 8 hours (%)

<3

Cooled Method

Water-cooled(20 to 25℃)

Output Method

Space output

Spot Size

~1.5

 (customizable)

Applications
Lithography
Semiconductor manufacturing
Nanostructure manufacturing
Semiconductor chip packaging
Biochip processing
Optical fiber processing
Material processing
Packaging lithography
MEMS manufacturing
Optical component processing
Downloads
193nm Laser