Using high-quality optical crystals and multi-stage nonlinear optical frequency conversion, a stable 193nm continuous laser output is finally obtained.
| Wavelength | 193 nm |
| Operational mode | CW |
| Power | 1 mW 10 mW |
| Linewidth | <5 kHz |
| M2 | TEM00,<1.6 |
| Beam waist diameter | ~2 mm |
| Cooling | Water-cooled |
| Wafer inspection |
| Semiconductor measurement |
| Mask inspection |
| Lithography |