Based on semiconductor-pumped microchip laser technology, by pumping excitation of a specific laser medium and undergoing a nonlinear frequency conversion process, a stable 266nm continuous laser beam is output.
| Wavelength | 266 nm |
| Operational mode | CW |
| Power | 10 mW 500 mW 1 W |
| M2 | TEM00 , <1.3 |
| Cooling | Water-cooled |
| Wafer surface inspection |
| Spectrometer calibration |
| Interferometry |
| Lithography |