info@kpglaser.com
United States (English / $USD)
HPNS-177
The 177nm deep UV laser, based on gas - discharge or solid - state tech, is used in semiconductor, materials, and research. Its short wavelength provides high - energy photons for high - resolution work.
Parameter
| Wavelength (nm) | 177 |
| Pulse Duration (ns) | ＜5 |
| Average Power(mW) | ~50 |
| Monopulse Energy (mJ) | 4.8 |
| Repetition Rate (Hz) | 1 to 10 |
| M² | ＜1.5 |
| Divergence Angle(mrad) | ＜3 |
| Polarization Ratio | >100:1 |
| Spot Diameter(mm) | <1 |
| Cooled Method | Water-cooled（15 to 35℃) |
| Voltage(V) | 220 |
Applications
| VLSI Lithography |
| 3D integrated chip lithography |
| Microstructure processing |
| Packaging lithography |
| Nanostructure fabrication |
| Nanolithography template production |
| Chip manufacturing |
| Material modification |
| Wafer cleaning |
| Spectroscopy |
Downloads
| 177nm Laser |
|
Didn’t find what you were looking for?
Contact Information
Email
info@kpglaser.com
Address
24 SIN MING LANE, MIDVIEW CITY, #06-97, SINGAPORE 573970
Copyright © 2024 KPG Laser